電解金めっき錘搭載静電容量型MEMS加速度センサの設計に向けた電解金めっき膜の微小機械特性と熱処理影響の評価

Publication Information

Title

Japanese:	電解金めっき錘搭載静電容量型MEMS加速度センサの設計に向けた電解金めっき膜の微小機械特性と熱処理影響の評価
English:

Author

Japanese:	飯間翔太, 栗岡智行, 菅野翔太, Chun Yi-Chen, Tso-Fu Mark Chang, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Shota Iima, Tomoyuki Kurioka, Shota Kanno, Chun Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

Japanese

Journal/Book name

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English:

Volume, Number, Page

Published date

Nov. 2025

Publisher

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Conference name

Japanese:	第17回集積化MEMSシンポジウム
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Conference site

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