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Publication Information
Title
Japanese:
English:
Application of electrodeposition utilizing supercritical carbon dioxide into nano-scale Cu wiring toward eco-friendly integrated circuit technology
Author
Japanese:
曽根 正人
,
樋口 和人
, Nao Yoshimoto,
清水 徹也
,
名越 貴志
,
栗岡 智行
,
Chang Tso-Fu Mark
.
English:
Masato Sone
,
Kazuhito Higuchi
, Nao Yoshimoto,
Tetsuya Shimizu
,
Takashi Nagoshi
,
Tomoyuki Kurioka
,
Tso-Fu Mark Chang
.
Language
English
Journal/Book name
Japanese:
English:
THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals
Volume, Number, Page
Published date
Oct. 16, 2025
Publisher
Japanese:
English:
Conference name
Japanese:
English:
THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals
Conference site
Japanese:
English:
XI'AN
©2007
Institute of Science Tokyo All rights reserved.