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Title
Japanese: 
English:Application of electrodeposition utilizing supercritical carbon dioxide into nano-scale Cu wiring toward eco-friendly integrated circuit technology 
Author
Japanese: 曽根 正人, 樋口 和人, Nao Yoshimoto, 清水 徹也, 名越 貴志, 栗岡 智行, Chang Tso-Fu Mark.  
English: Masato Sone, Kazuhito Higuchi, Nao Yoshimoto, Tetsuya Shimizu, Takashi Nagoshi, Tomoyuki Kurioka, Tso-Fu Mark Chang.  
Language English 
Journal/Book name
Japanese: 
English:THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals 
Volume, Number, Page        
Published date Oct. 16, 2025 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals 
Conference site
Japanese: 
English:XI'AN 

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