Sputtering-Annealing Hybrid Process for Ultra-High-Speed Synthesis of 2D material and van der Waals Heterostructure

Publication Information

Title

Japanese:
English:	Sputtering-Annealing Hybrid Process for Ultra-High-Speed Synthesis of 2D material and van der Waals Heterostructure

Author

Japanese:	梶山直栄, 張鋭璽, Takahito Imanishi, 平田祐樹.
English:	Nobuharu Kajiyama, Ruixi Zhang, Takahito Imanishi, Yuki Hirata.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2nd JSME International Conference on Materials & Processing

Conference site

Japanese:
English:	Guam