Evaluation of annealing effects on the deformation of Ti/Au multi-layered micro-cantilevers

Publication Information

Title

Japanese:
English:	Evaluation of annealing effects on the deformation of Ti/Au multi-layered micro-cantilevers

Author

Japanese:	宮井良介, 栗岡智行, 陳君怡, Chang Tso-Fu Mark, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:	Micro and Nano Engineering
English:	Micro and Nano Engineering

Volume, Number, Page

Vol. 29 pp. 100333

Published date

Oct. 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI