酸窒化ジルコニウムエピタキシャル薄膜の合成と物性評価

Publication Information

Title

Japanese:	酸窒化ジルコニウムエピタキシャル薄膜の合成と物性評価
English:	Synthesis and characterizations of zirconium oxynitride epitaxial thin films

Author

Japanese:	宮崎大地, 吉松公平, 大友明.
English:	Daichi Miyazaki, Kohei Yoshimatsu, Akira Ohtomo.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 17, 2026

Publisher

Japanese:
English:

Conference name

Japanese:	第73回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京
English: