Piezoelectric micropatterns fabricated by femtosecond laser processing for d33-mode piezoelectric MEMS

Publication Information

Title

Japanese:
English:	Piezoelectric micropatterns fabricated by femtosecond laser processing for d33-mode piezoelectric MEMS

Author

Japanese:	Song Jundong, Hiumi Terashima, Naoki Shibao, Takashi Nakajima, Takashi Iijima, Xi Yu, 春本高志, 史蹟, Shingo Ono, Soichiro Okamura.
English:	Jundong Song, Hiumi Terashima, Naoki Shibao, Takashi Nakajima, Takashi Iijima, Xi Yu, Takashi Harumoto, Ji Shi, Shingo Ono, Soichiro Okamura.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

139 044102

Published date

Jan. 23, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL