Layer-Structure Effects on Warpage Behaviors of Proof-Masses with Ti/Au Multi-Layered Structures toward MEMS Capacitive Accelerometers

Publication Information

Title

Japanese:
English:	Layer-Structure Effects on Warpage Behaviors of Proof-Masses with Ti/Au Multi-Layered Structures toward MEMS Capacitive Accelerometers

Author

Japanese:	奥村雅子, 栗岡智行, 彦坂元, 町田克之, Chang Tso-Fu Mark, 伊藤浩之, 三宅美博, 曽根正人.
English:	Masako Okumura, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken)

Conference site

Japanese:
English:	Interlaken