Design Strategy for Material Properties of Multi-layered Ti/Au Micro-components by Electrodeposition Towards Ultra-high Sensitive MEMS Inertial Sensors

Publication Information

Title

Japanese:
English:	Design Strategy for Material Properties of Multi-layered Ti/Au Micro-components by Electrodeposition Towards Ultra-high Sensitive MEMS Inertial Sensors

Author

Japanese:	曽根正人, 栗岡智行, 彦坂元, Chang Tso-Fu Mark, 陳君怡, 町田克之, 伊藤浩之, 三宅美博.
English:	Masato Sone, Tomoyuki Kurioka, Gen Hikosaka, Tso-Fu Mark Chang, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake.

Language

English

Journal/Book name

Japanese:
English:	The 9th International Conference on Material Strength and Applied Mechanics (MSAM 2026)

Volume, Number, Page

Published date

July 15, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 9th International Conference on Material Strength and Applied Mechanics (MSAM 2026)

Conference site

Japanese:
English:	松江