六方晶窒化ホウ素多層膜を用いた完全歪み緩和Ti O 薄膜の実現

Publication Information

Title

Japanese:	六方晶窒化ホウ素多層膜を用いた完全歪み緩和Ti O 薄膜の実現
English:

Author

Japanese:	菅野圭太朗, 相馬拓人, 深町悟, 吾郷浩樹, 奥山大輔, 大友明, 吉松公平.
English:	Keitaro Kanno, Takuto Soma, 深町悟, 吾郷浩樹, Daisuke Okuyama, Akira Ohtomo, Kohei Yoshimatsu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	第87回応用物理学会秋季学術講演会

Conference site

Japanese:	札幌
English: