Material &amp; Structural Design of Multi- layered Ti/Au Micro-components by Precise Electrodeposition Towards Nano-G Resolution MEMS Capacitive Inertial Sensors

Publication Information

Title

Japanese:
English:	Material & Structural Design of Multi- layered Ti/Au Micro-components by Precise Electrodeposition Towards Nano-G Resolution MEMS Capacitive Inertial Sensors

Author

Japanese:	曽根正人, 栗岡智行, 彦坂元, Chang Tso-Fu Mark, 陳君怡, 町田克之, 伊藤浩之, Hirotake Uchitomi, Daiki Ogata, 三宅美博.
English:	Masato Sone, Tomoyuki Kurioka, Gen Hikosaka, Tso-Fu Mark Chang, Chun-Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Hirotake Uchitomi, Daiki Ogata, Yoshihiro Miyake.

Language

English

Journal/Book name

Japanese:
English:	European Materials Research Society

Volume, Number, Page

Published date

Sept. 14, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	European Materials Research Society

Conference site

Japanese:
English:	Warsaw