Sputtering–Annealing Hybrid Process for Controlled and Scalable Fabrication of van der Waals Heterostructures

Publication Information

Title

Japanese:
English:	Sputtering–Annealing Hybrid Process for Controlled and Scalable Fabrication of van der Waals Heterostructures

Author

Japanese:	平田祐樹, 梶山直栄, 張鋭璽.
English:	Yuki Hirata, Nobuharu Kajiyama, Ruixi Zhang.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 7, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	10th Annual Nanotechnology Conference – NANOMAT2026

Conference site

Japanese:
English:	Brno