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Home > Help Publication Information Title Japanese: Effects of Microelectrode Pattern Density on Electroplated Film Thickness Distribution for MEMS Device Fabrication  English: Effects of Microelectrode Pattern Density on Electroplated Film Thickness Distribution for MEMS Device Fabrication  Author Japanese: Kota Sakanashi, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Shinichi Iida, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.   English: Kota Sakanashi, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Shinichi Iida, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.   Language English  Journal/Book name Japanese:   English:   Volume, Number, Page         Published date Nov. 2026  Publisher Japanese:   English:   Conference name Japanese: 2026 International Conference on Green Electrochemical Technologies (2026 ICGET-Tw)  English: 2026 International Conference on Green Electrochemical Technologies (2026 ICGET-Tw)  Conference site Japanese:   English: Taoyuan

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