We examined the vibrational and rotational temperatures of the C3Π and B3Π states of N2 by optical emission spectroscopy. We measured the band spectra (first and second positive systems) of N2 compared the experimentally measured and the calculated spectra to determine the actual vibrational and rotational temperatures of the generated plasma. We generated a microwave discharge nitrogen plasma in a cylindrical quartz tube (26 mm i.d.) with a discharge pressure of 0.5–1.0 Torr. The microwave frequency was 2.45 GHz and the output power was set at 600 W. It was found that Tv≈0.5–0.7 eV and Tr≈0.07–0.15 eV at B3Π (v=7, 8 and 9), whereas Tv≈0.65–0.9 eV and Tr≈0.06–0.16 eV at C3Π (v=0 and 1). We also discussed the measured vibrational populations using theoretical calculations, in which the variation in the number density was expressed in terms of molecular processes.
各種検索
サポート
ヘルプ