Growth, structure and transport properties of thin (>10 nm) n-type microcrystalline silicon prepared on silicon oxide and its application to single electron transistor
著者
和文:
T. Kamiya,
K. Nakahata,
Y.T. Tan,
Z.A.K. Durrani,
I. Shimizu.
英文:
T. Kamiya,
K. Nakahata,
Y.T. Tan,
Z.A.K. Durrani,
I. Shimizu.
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