Thermodynamics for Fabricating AlN/alon/sapphire Double Epitaxial Layers as an Advanced Substrate for Blue/Ultraviolet Optical Devices

論文・著書情報

タイトル

和文:
英文:	Thermodynamics for Fabricating AlN/alon/sapphire Double Epitaxial Layers as an Advanced Substrate for Blue/Ultraviolet Optical Devices

著者

和文:	H.Fukuyama, W.Nakao, K.Nagata.
英文:	H.Fukuyama, W.Nakao, K.Nagata.

言語

English

掲載誌/書名

和文:
英文:	State-of-the-Art Program on Compound Semiconductors XXXVI and Wide Bandgap Semiconductors for Photonic and Electronic Devices and Sensors II, (The Electrochemical Society), Philadelphia, PA, USA, May (2002)

巻, 号, ページ

Vol. 2002-3 pp. 155-163

出版年月

2002年

出版者

和文:
英文:	State-of-the-Art Program on Compound Semiconductors XXXVI and Wide Bandgap Semiconductors for Photonic and Electronic Devices and Sensors II, (The Electrochemical Society), Philadelphia, PA, USA, May (2002)

会議名称

和文:
英文:

開催地

和文:
英文: