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タイトル
和文: 
英文:Experimental Study of Temperatures of Atmospheric-Pressure Nonequilibrium Ar/N2 Plasma Jets and Poly(ethylene terephtalate)-Surface Processing 
著者
和文: 湯地 敏史, 須崎 嘉文, T. Yamawaki, H. Sakaue, 赤塚 洋.  
英文: T. Yuji, Y. Suzaki, T. Yamawaki, H. Sakaue, H. Akatsuka.  
言語 English 
掲載誌/書名
和文: 
英文:Jpn. J. Appl. Phys. 
巻, 号, ページ Vol. 46    No. 2    pp. 795-798
出版年月 2007年2月8日 
出版者
和文: 
英文:IOP Publishing 
会議名称
和文: 
英文: 
開催地
和文: 
英文: 
公式リンク https://iopscience.iop.org/article/10.1143/JJAP.46.795
 
DOI https://doi.org/10.1143/JJAP.46.795
アブストラクト To understand the mechanism of surface processing using atmospheric-pressure nonequilibrium plasma jets, we measured thevibrational and rotational temperatures in the plasmas by optical emission spectroscopy. Plasma was excited using a high-frequency pulsed power supply, using a gas mixture of Ar (20 L/min) and N2(0.1 to 0.5 L/min) as the plasma gas, andchanging the flow rate of N2gas at an input power of 100 W and plasma frequencies of 5 and 10 kHz. The measuredvibrational and rotational temperatures in plasma were approximately 0.18 to 0.26 eV and 0.21 to 0.28 eV, respectively. Wealso carried out a plasma surface processing of polyethylene terephtalate film to measure the changes in water contact anglebefore and after the processing. We found a monotonic decrease in the contact angle of the processed poly(ethyleneterephtalate) (PET) film as plasma rotational temperature increased. It is concluded that the hydrophilicity of the PET surfaceincreases with plasma rotational temperature.

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