The defect-related relaxation behavior and the leakage of fresh and/or dc-electrically degraded specimens of Au/(Ba0.5Sr0.5)TiO3/Pt capacitors on the TiO2 coated sapphire substrates were investigated. The relaxation behavior of (Ba0.5Sr0.5)TiO3 films are assumed to be the electron-detrapping in the depletion layer. The local electric field enhancement due to oxygen vacancies near the Pt/(Ba0.5Sr0.5)TiO3 interface, which is estimated from the Poisson equation, was assumed to be sufficiently high as a cause of tunneling conduction, and assumed to be a cause of dc-electrical degradation.
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