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タイトル
和文: 
英文:Approximate Monitoring of Electron Temperature and Density of Argon-Based Plasma by Line-Intensity Ratio Measurement with Collisional Radiative Model 
著者
和文: 赤塚 洋, E. Tanaka, 安藤 健太朗, 根津 篤, 桑原 大介, 篠原 俊二郎.  
英文: H. Akatsuka, E. Tanaka, K. Ando, A. Nezu, D. Kuwahara, S.Shinohara.  
言語 English 
掲載誌/書名
和文: 
英文:Proceedings of 2015 International Symposium on Dry Process 
巻, 号, ページ         pp. 95-96
出版年月 2015年11月5日 
出版者
和文: 
英文:The Japan Society of Applied Physics 
会議名称
和文: 
英文:2015 International Symposium on Dry Process 
開催地
和文:淡路市 
英文:Awaji 
公式リンク http://www.dry-process.org/2015/index.html
 
アブストラクト We surveyed the dependence of excited-state density of argon atom on the electron temperature Te and density Ne by applying Ar CR model. It is found that the ratios between some level pairs can be interpreted as an approximate measure of Te, and some others as that of Ne. For example, the density ratio of (4p’[1/2]0)/(4p[1/2]0) is determined mostly by Te, while that of (4d[3/2]o)/(4p[1/2]) mostly by Ne. We discuss the reason for this difference for each level pair in terms of atomic processes in the argon plasma, based on the CR model.

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