In IoT/IoE era, low-power and highly-sensitive technique is essential to distribute the internet terminals in quantities. In this presentation, research and development of a wireless sensitive acceleration sensor module for living body observations, on which our laboratory is working, are introduced as an example of low-voltage low-power RF CMOS circuit technology, acceleration sensor MEMS device technology and the material technology used for the acceleration sensor device, and thus the integration technology from materials, devices and circuits will become increasingly important.
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