The 2019 International Conference on Solid State Devices and Materials
開催地
和文:
名古屋
英文:
Nagoya
アブストラクト
We have demonstrated the propagation of light at a wavelength of 1.55 μm through a single-mode waveguide using a Si/CaF2 heterostructure formed on a silicon-on-insulator (SOI) substrate, which is a key component for Si/CaF2 quantum cascade lasers. In this study, a new design for Si/CaF2 (core) and SiO2 (cladding) waveguide has been proposed and a fabrication process utilizing reactive ion etching has been developed. The propagation of near infrared light has been confirmed and the waveguide losses have been evaluated.
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