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タイトル
和文: 
英文:Nonequilibrium characteristics in the rotational temperature of CO excited states in microwave discharge CO2 plasma 
著者
和文: 山田祥太, 森田雄貴, 根津篤, 赤塚洋.  
英文: Shota Yamada, Yuki Morita, Atsushi Nezu, Hiroshi Akatsuka.  
言語 English 
掲載誌/書名
和文: 
英文:Japanese Journal of Applied Physics 
巻, 号, ページ Vol. 60    No. 4    pp. 046005-1 -- 046005-10
出版年月 2021年3月10日 
出版者
和文: 
英文:IOP Science 
会議名称
和文: 
英文: 
開催地
和文: 
英文: 
公式リンク https://iopscience.iop.org/article/10.35848/1347-4065/abee04
 
DOI https://doi.org/10.35848/1347-4065/abee04
アブストラクト Optical emission spectroscopy measurements are performed on the third positive system (3PS) and Ångstrom system bands for microwave discharge CO2 plasma with its discharge pressure of 1 Torr. The molecular vibrational temperature T_v and rotational temperature T_r of CO b and B states are determined as the best fitting parameters. It is found that T_v ~ 0.15 - 0.24 eV and T _r ~ 0.08 − 0.15 eV for the CO b state for the 3PS band. The general fitting of the CO Ångstrom band is difficult with a mono-rotational temperature, whereas two rotational temperatures with bulk component T_r^{bulk} and high-energy tail T_r^{tail} can fit the experimentally observed spectrum with sufficient agreement. It is found that T_v ~ 0.3 − 0.4 eV, T_r^{bulk} ~ 0.03 − 0.04 eV, and T_r^{tail} ~ 0.13 − 0.17 eV for the CO B state. The observed nonequilibrium characteristics are discussed in terms of molecular processes.

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