The plasma diagnosis of 133 Pa argon microwave discharge plasma by optical emission spectroscopic measurement based on systematic excitation-kinetics analysis
Electron temperature, density, and electron density distribution function of 133 Pa argon microwave
discharge plasma were diagnosed by optical emission spectroscopic measurement. As a result of
systematic analysis of the reduced population density distribution based on argon collisionalradiative
model, we found emission lines that can be reasonably diagnosed. The diagnostics results
were compared with line-pair method, excitation-temperature conversion method, and probe
measurement.
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