Diagnosis of spatial distribution of electron temperature and electron density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement
Argon inductively coupled plasma was diagnosed by tomographic optical emission spectroscopy. Tomographic spectra were analyzed based on the collisional-radiation model to obtain the dependence of electron temperature and density on spatial positions. The dependence of those spatially-resolved plasma parameters upon radio-frequency power and gas pressure is discussed by contrasting experimental and electromagnetic field analysis results.
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