Plasma Enhanced Atomic Layer Deposition for Conformal Coating of Manganese Oxide on Carbon Nanowalls

論文・著書情報

タイトル

和文:	Plasma Enhanced Atomic Layer Deposition for Conformal Coating of Manganese Oxide on Carbon Nanowalls
英文:	Plasma Enhanced Atomic Layer Deposition for Conformal Coating of Manganese Oxide on Carbon Nanowalls

著者

和文:	Nasrin Hossein Nedjad, DongHoon Shin, Abdessadk Anagri, Fatemeh Bohlooli, Shinsuke Mori, Jerome Pulpytel, Farzaneh Arefi-Khonsari.
英文:	Nasrin Hossein Nedjad, DongHoon Shin, Abdessadk Anagri, Fatemeh Bohlooli, Shinsuke Mori, Jerome Pulpytel, Farzaneh Arefi-Khonsari.

言語

English

掲載誌/書名

和文:	Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25)
英文:	Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25)

巻, 号, ページ

POS-7-212

出版年月

2023年5月

出版者

和文:
英文:

会議名称

和文:	25th International Symposium on Plasma Chemistry (ISPC25)
英文:	25th International Symposium on Plasma Chemistry (ISPC25)

開催地

和文:	Japan
英文:	Kyoto