A highly versatile evaluation method is proposed for transient plasmas based on statistical physics. It would be beneficial in various industrial sectors, including semiconductors and automobiles. Our research focused on low-energy plasmas in laboratory settings, and they were assessed via our proposed method, which incorporates relative entropy and fractional Brownian motion, based on a revised collisional–radiative model. By introducing an indicator to evaluate how far a system is from its steady state, both the trend of entropy and the radiative process’ contribution to the lifetime of excited states were considered. The high statistical weight of some excited states may act as a bottleneck in the plasma’s energy relaxation throughout the system to a steady state. By deepening our understanding of how energy flows through plasmas, we anticipate potential contributions to resolving global environmental issues and fostering technological innovation in plasma-related industrial fields.
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