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SEIICHI HATA Researcher Information

Family Name 秦  HATA 
First Name 誠一  SEIICHI 
Status Resigned or Graduated
Specialized Field Others (Materials for MEMS, Combinatorial technology, Microelectromechnical systems)
Degree 薄膜金属ガラスとその三次元マイクロ構造体への応用,  Thesis,  Doctor of Engineering,  Tokyo Institute of Technology,  2002/02/--, 
超精密加工用微小変位台の研究,  Master of Engineering,  Tokyo Institute of Technology,  1994/03/--, 

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