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大友将樹 研究業績一覧 (1件)
論文
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Masaki Otomo,
Masaya Hamada,
Ryo Ono,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Hitoshi Wakabayashi.
Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer,
Japanese Journal of Applied Physics,
IOP Publishing,
Vol. 62,
p. SC1015,
Jan. 2023.
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