|
圷晴子 2018年 研究業績一覧 (1件 / 7件)
論文
-
Reiko Saito,
* Haruko Akutsu,
Jun Asakawa,
Shiro Takeno,
Kei Kiyokawa,
Satoru Nagashima,
Takeharu Ishikawa,
Takahiro Kashiwagi,
Akio Takano,
Tetsuo Sakamoto,
Masaaki Fujii.
Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry,
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena,
36,
3,
03F128,
May 2018.
[ BibTeX 形式で保存 ]
[ 論文・著書をCSV形式で保存
]
[ 特許をCSV形式で保存
]
|