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脇谷尚樹 2019年 研究業績一覧 (1件 / 253件)
論文
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Chunfu LIN,
Takashi TANAKA,
Akio NISHIYAMA,
Tadashi SHIOTA,
Osamu SAKURAI,
Naoki WAKIYA,
Kazuo SHINOZAKI,
Kouichi YASUDA.
Effect of deposition conditions and buffer layers on amorphous or polytype phase formation in Al2O3 thin films by chemical vapor deposition using tri-methyl aluminum,
J. Ceram. Soc. Japan,
The Ceramic Society of Japan,
Vol. 127,
No. 6,
pp. 443-450,
June 2019.
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