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Title
Japanese:トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断 
English:Positional distribution diagnosis of electron temperature, electron density, and EEDF of CF4/O2/Ar plasma based on tomographic optical emission spectroscopic measurement and argon collisional-radiative model 
Author
Japanese: 山下 雄也, 土居 謙太, 清田哲司, 叶宇晨, 島谷和希, 何文涛, 羽生陽向, 菊地航行, 櫻井彩貴, 根津篤, 赤塚洋.  
English: uya Yamashita, Kenta Doi, Tetsuji Kiyota, Yuchen Ye, Kazuki Shimatani, Wentao He, Hinata Hanyu, Wataru Kikuchi, Ayaki Sakurai, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第85回応用物理学会秋季学術講演会 講演要旨集 
English:Exetnded Abstracts of the 85th JSAP Autumn Meeting 2024 
Volume, Number, Page        
Published date Sept. 4, 2024 
Publisher
Japanese:公益社団法人 応用物理学会 
English:Japan Society of Applied Physics 
Conference name
Japanese:第85回応用物理学会秋季学術講演会 
English:The 85th JSAP Autumn Meeting 2024 
Conference site
Japanese:新潟 
English:Niigata 
Official URL https://pub.confit.atlas.jp/ja/event/jsap2024a/presentation/20a-A32-5
 
Abstract Diagnosis of molecular mixed plasmas are difficult because of the complexity of atomic-molecular processes. In this study, the diagnosis of the mixed plasma was realized by focusing on the atomic and molecular processes of monatomic molecules in the mixed plasma. Optical emission spectra of CF4/O2/Ar inductively coupled plasma were acquired for tomographic emission spectroscopy measurement. The spectra were analyzed by the Ar collisional-radiative model. The electron temperature, electron density, and generalized electron energy distribution function (EEDF) were diagnosed as positional distributions. The EEDF was non-Maxwell distribution.

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