Domestic Conference (Not reviewed / Unknown)

• uya Yamashita, Kenta Doi, Tetsuji Kiyota, Yuchen Ye, Kazuki Shimatani, Wentao He, Hinata Hanyu, Wataru Kikuchi, Ayaki Sakurai, Atsushi Nezu, Hiroshi Akatsuka. Positional distribution diagnosis of electron temperature, electron density, and EEDF of CF4/O2/Ar plasma based on tomographic optical emission spectroscopic measurement and argon collisional-radiative model, The 85th JSAP Autumn Meeting 2024, Exetnded Abstracts of the 85th JSAP Autumn Meeting 2024, Japan Society of Applied Physics, Sept. 2024.  Official location  

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