論文

• Hirokazu Chiba, Masaki Hirano, Kazuhisa Kawano, Noriaki Oshima, Hiroshi Funakubo. Effect of substrate type and temperature on the growth of thin Ru films by metal organic chemical vapor deposition, Materials Science in Semiconductor Processing, vol. 70, pp. 73–77, Nov. 2017.
• Hiroshi Funakubo, Takahisa Shiraishi, Takahiro Oikawa, Masaki Hirano, Hirokazu Chiba and, Kazuhisa Kawano. Effect of Incubation Time on Preparation of Continuous and Flat Ru Films, J. Vac. Sci. Technol. A., Vol. 33, No. 1, pp. 01A149-1-6, Jan. 2015.
• Masaki Hirano, Kazuhisa Kawano, Hiroshi Funakubo. Effect of incubation time on deposition behavior of Ruthenium films by MOCVD using (2,4-Dimethy lpentadienyl) (ethylcyclopentadienyl) Ruthenium, Key Engineering Materials, Vol. 421-422, pp. 87-90, 2010.

国際会議発表 (査読有り)

• M. Ishikawa, T. Fujisawa, S. Yasui, T. Kamo, M. Hirano, T. Yamada, M. Kurosawa, T. Morita, H. Funakubo. Growth of Epitaxial Potassium Niobate Film on (100)SrRuO3/(100)SrTiO3 by Hydrothermal Method and Their Electromechanical Properties, Proc. 2008 Materials Research Society Fall Meeting, Dec. 2008.

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