論文

• Tso-Fu Mark Chang, Hikaru Kinashi, Takashi Nagoshi, Tatsuo Sato, Masato Sone. Impurity study of copper film fabricated by electroplating with supercritical carbon dioxide emulsified electrolyte, Copper and Copper Alloy, Vol. 58, No. 1, pp. 177-181, June 2019.
• 名越貴志, 木梨光, 武藤雅英, Tso-Fu Mark Chang, 里達雄, 曽根正人. 超臨界二酸化炭素エマルション中で電気めっきされた銅皮膜のマイクロ圧縮試験による力学的特性評価, 銅と銅合金, 日本銅学会, Vol. 53, No. 1, pp. 161-165, Aug. 2014.
• Hikaru Kinashi, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Mechanical Properties of Cu Electroplated in Supercritical CO2 Emulsion Evaluated by Micro-Compression Test, Microelectronics Engineering, Elsevier, Vol. 121, pp. 83-86, May 2014.
• Tetsuya Shimizu, Yuma Ishimoto, Tso-Fu Mark Chang, Hikaru Kinashi, Takashi Nagoshi, Tatsuo Sato, Masato Sone. Cu Wiring into Nano-Scale Holes by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte with a Continuous Flow Reaction System, The Journal of Supercritical Fluids, Elsevier, Vol. 60, pp. 60-64, May 2014.

国際会議発表 (査読有り)

• Masato Sone, Tetsuya Shimizu, Tso-Fu Mark Chang, Yuma Ishimoto, Hikaru Kinashi, Takashi Nagoshi, Tatsuo Sato. Nanoscale Wiring By Cu Electrodeposition in Supercritical Carbon Dioxide (Invited Lecture), 224th ECS Meeting, ECS, Nov. 2013.
• Tso-Fu Mark Chang, Takashi Nagoshi, Nao Shinoda, HIkaru Kinashi, Tatsuo Sato, Masato Sone. Application of Supercritical CO2 in Electroplating of Ni and Cu, SuperGreen 2013,The 8th International Conference on Supercritical Fluids, SuperGreen 2013,The 8th International Conference on Supercritical Fluids, Oct. 2013.
• Hikaru Kinashi, Tetsuya Shimizu, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Glow discharge optical emission spectroscopic study of Cu film fabricated by electrodepostion using supercritical CO2 emulsified electrolyte, TACT2013, International Thin Films Conference, TACT2013, Oct. 2013.
• Hikaru Kinashi, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Mechanical Strength of Cu Electroplated in Supercritical CO2 Emulsion Using Micro-Compression Test, MNE2013, 39th International Conference on Micro and Nano Engineering, MNE2013, Sept. 2013.

国内会議発表 (査読なし・不明)

• 名越貴志, 木梨光, 武藤雅英, Tso-Fu Mark Chang, 里達雄, 曽根正人. マイクロ圧縮試験を用いた銅めっき膜の力学的特性評価, 日本銅学会第５３回講演大会, 日本銅学会第５３回講演大会, Nov. 2013.

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