論文

• Yuki Taoka, Tomohiro Ryo, Sanchuan XU, Shigeki SAITO. Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes, Engineering Research Express, IOP Publishing, Vol. 6, No. 1, pp. 015046, Jan. 2024.  公式リンク  
  
• Yuki Taoka, Terumichi Hayashi, Sanchuan XU, Shigeki SAITO. Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure, Advanced Robotics, Taylor & Francis, Vol. 37, No. 23, pp. 1507-1519, Nov. 2023.  公式リンク  
  

国内会議発表 (査読なし・不明)

• Sanchuan XU, Yuki Taoka, Shigeki SAITO. Attractive Force Increased by Rotational Degree Of-Freedom Tip Structure Used in Beam Structure Electrostatic Chucks, 2024年度精密工学会春季大会学術講演会, Mar. 2024.
• Sanchuan XU, Yuki Taoka, Shigeki SAITO. Rotational-Degree-Of -Freedom Tip Structure Used in Collective Beam Structure Electrostatic Chuck for Curved Surfaces, 2022年度精密工学会春季大会学術講演会, 2022年度精密工学会春季大会学術講演会論文集, Mar. 2022.

[ BibTeX 形式で保存 ]    [ 論文・著書をCSV形式で保存 ]    [ 特許をCSV形式で保存 ]