International Conference (Reviewed)

• Junnosuke Furuya, Taiki Osawa, Akane Yaida, Nobuhiko Nishiyama, AKITOSHI OKINO. 349 mm atmospheric linear type plasma source for 12-inch semiconductor surface processing, The 77th Annual Gaseous Electronics Conference, Oct. 2024.

Domestic Conference (Reviewed)

• Koki Hihara, Junnosuke Furuya, Akane Yaida, AKITOSHI OKINO, Nobuhiko Nishiyama. Silicon surface treatment by atmospheric linear type particle free plasma for fabrication of heterogeneous material integrated optical circuits, The 71st JSAP Spring Meeting2024, Mar. 2024.
• Junnosuke Furuya, Koki Hihara, Akane Yaida, Hajime Urai, 上本道久, AKITOSHI OKINO. Development of linear type multi-gas plasma source for uniform treatment of biomaterials, 生体医歯工学共同研究拠点成果報告会, Mar. 2024.

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