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Publication List - Taro Omura 2022 (3 / 10 entries)
Journal Paper
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Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression,
Surface & Coatings Technology,
Elsevier,
Vol. 436,
p. 128315,
Feb. 2022.
Official location
International Conference (Reviewed)
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Taro Omura,
Chun-Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
Domestic Conference (Reviewed)
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