高精度機械運動システムの機構設計技術　～マイクロ運動機構実現に向けて～

Publication Information

Title

Japanese:	高精度機械運動システムの機構設計技術　～マイクロ運動機構実現に向けて～
English:	Mechanism Design Technologies of High-Precision Machinery Systems

Author

Japanese:	武田行生.
English:	Yukio TAKEDA.

Language

Japanese

Journal/Book name

Japanese:	日本機械学会講習会　マイクロ機械システムを支えるメカトロニクス技術
English:	Japan Society of Mechanical Engineers, Symposium on Mechatronics Technologies for Micro Mechanical Systems

Volume, Number, Page

pp. 5-9

Published date

Nov. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: