Self-Aligned Quadruple Patterningのための配線パターンの効率的な生成手法

Publication Information

Title

Japanese:	Self-Aligned Quadruple Patterningのための配線パターンの効率的な生成手法
English:	Effective Routing Pattern Generation Method for Self-Aligned Quadruple Patterning

Author

Japanese:	井原岳志, 本江俊幸, 高橋篤司.
English:	Takeshi Ihara, Toshiyuki Hongo, Atsushi Takahashi.

Language

Japanese

Journal/Book name

Japanese:	DAシンポジウム2015 論文集，情報処理学会シンポジウムシリーズ
English:	Proc. DA Symposium 2015, IPSJ Symposium Series

Volume, Number, Page

Vol. 2015 pp. 125-130

Published date

Aug. 19, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

Official URL