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Title
Japanese: 
English:Excitation-kinetic model for argon processing plasma diagnostics by optical emission spectroscopic measurement based on collisional-radiative model 
Author
Japanese: 山下雄也, 赤塚洋.  
English: Yuya Yamashita, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Proceedings of International Syhmposium on Dry Process 
Volume, Number, Page         pp. 83 - 84
Published date Nov. 16, 2017 
Publisher
Japanese: 
English:International Syhmposium on Dry Process Organizing Committees 
Conference name
Japanese: 
English:39th International Syhmposium on Dry Process 
Conference site
Japanese:東京 
English:Tokyo 
Official URL http://www.dry-process.org/2017/index.html
 
Abstract To measure electron temperature and density of argon processing plasma by optical emission spectroscopic measurement, we made the excitation-kinetic models to describe excited-states densities, based on collisional-radiative model. The models tuned for a limited range of the electron temperature and density independent of the Griem's boundary can approximate the real excitation-kinetics well. Further prospects are discussed in terms of the excitation-kinetic models.

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