Multi-layered MoS2 film formed by high-temperature sputtering for enhancement-mode nMOSFETs

Publication Information

Title

Japanese:
English:	Multi-layered MoS2 film formed by high-temperature sputtering for enhancement-mode nMOSFETs

Author

Japanese:	大橋匠, 須田耕平, 石原聖也, 澤本直美, 山口晋平, 松浦賢太朗, 角嶋邦之, 杉井信之, 西山彰, 片岡好則, 名取研二, 筒井一生, 岩井洋, 小椋厚志, 若林整.
English:	T. Ohashi, K. Suda, S. Ishihara, N. Sawamoto, S. Yamaguchi, K. Matsuura, K. Kakushima, N. Sugii, A. Nishiyama, Y. Kataoka, K. Natori, K. Tsutsui, H. Iwai, A. Ogura, H. Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:	Japan Journal of Applied Physics

Volume, Number, Page

Vol. 54 No. 4S

Published date

Mar. 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: