Large Scale Uniformity of Sputtering Deposited Single- and Few-Layer MoS2 Investigated by XPS Multipoint Measurements and Histogram Analysis of Optical Contrast

Publication Information

Title

Japanese:
English:	Large Scale Uniformity of Sputtering Deposited Single- and Few-Layer MoS2 Investigated by XPS Multipoint Measurements and Histogram Analysis of Optical Contrast

Author

Japanese:	S. Ishihara, Y. Hibino, N. Sawamoto, 大橋匠, 松浦賢太朗, H. Machida, M. Ishikawa, 若林整, 小椋厚志.
English:	S. Ishihara, Y. Hibino, N. Sawamoto, T. Ohashi, K. Matsuura, H. Machida, M. Ishikawa, H. Wakabayashi, A. Ogura.

Language

English

Journal/Book name

Japanese:
English:	ECS J. Solid State Sci. Technol.

Volume, Number, Page

Vol. 5 No. 11

Published date

2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: