Multi-Layered MoS2 Thin Film Formed by High-Temperature Sputtering for Enhancement-Mode nMOSFETs

Publication Information

Title

Japanese:
English:	Multi-Layered MoS2 Thin Film Formed by High-Temperature Sputtering for Enhancement-Mode nMOSFETs

Author

Japanese:	大橋匠, K. Suda, S. Ishihara, N. Sawamoto, S. Yamaguchi, 松浦賢太朗, 角嶋邦之, 杉井信之, 西山彰, 片岡好則, 名取研二, 筒井一生, 岩井洋, A. Ogura, 若林整.
English:	T. Ohashi, K. Suda, S. Ishihara, N. Sawamoto, S. Yamaguchi, K. Matsuura, K. Kakushima, N. Sugii, A. Nishiyama, Y. Kataoka, K. Natori, K. Tsutsui, H. Iwai, A. Ogura, Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:	Extended Abstracts of the 2014 International Conference on Solid State Devices and Materials

Volume, Number, Page

1074

Published date

2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Solid State Devices and Materials

Conference site

Japanese:
English: