Improving Crystalline Quality of Sputtering Deposited MoS2 Thin Film by Post-Deposition Sulfurization Annealing Using (t-C4H9)2S2

Publication Information

Title

Japanese:
English:	Improving Crystalline Quality of Sputtering Deposited MoS2 Thin Film by Post-Deposition Sulfurization Annealing Using (t-C4H9)2S2

Author

Japanese:	S. Ishihara, K. Suda, Y. Hibino, N. Sawamoto, 大橋匠, S. Yamaguchi, 松浦賢太朗, H. Machida, M. Ishikawa, H. Sudoh, 若林整, 小椋厚志.
English:	S. Ishihara, K. Suda, Y. Hibino, N. Sawamoto, T. Ohashi, S. Yamaguchi, K. Matsuura, H. Machida, M. Ishikawa, H. Sudoh, H. Wakabayashi, A. Ogura.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Solid State Devices and Materials

Conference site

Japanese:
English: