Sulfurization in Sulfur Vapor for Sputtered-MoS2 Film

Publication Information

Title

Japanese:
English:	Sulfurization in Sulfur Vapor for Sputtered-MoS2 Film

Author

Japanese:	松浦賢太朗, 大橋匠, 宗田伊理也, S. Ishihara, N. Sawamoto, 角嶋邦之, 筒井一生, 小椋厚志, 若林整.
English:	K. Matsuura, T. Ohashi, I. Muneta, S. Ishihara, N. Sawamoto, K. Kakushima, K. Tsutsui, A. Ogura, H. Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:	Proc. of 47th IEEE Semiconductor Interface Specialists Conference (SISC)

Volume, Number, Page

Published date

2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: