Effects of Reaction Conditions on MoS2 Thin Film Formation Synthesized by Chemical Vapor Deposition using Organic Precursor

Publication Information

Title

Japanese:
English:	Effects of Reaction Conditions on MoS2 Thin Film Formation Synthesized by Chemical Vapor Deposition using Organic Precursor

Author

Japanese:	S. Ishihara, Y. Hibino, N. Sawamoto, K. Suda, 大橋匠, 松浦賢太朗, H. Machida, M. Ishikawa, H. Sudoh, 若林整, 小椋厚志.
English:	S. Ishihara, Y. Hibino, N. Sawamoto, K. Suda, T. Ohashi, K. Matsuura, H. Machida, M. Ishikawa, H. Sudoh, H. Wakabayashi, A. Ogura.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRS Spring Meeting & Exhibit

Conference site

Japanese:
English:	Arizona