Centimeter-scale high-performance few-layer MoS2 fabricated by RF magnetron sputtering and subsequent post-deposition annealing

Publication Information

Title

Japanese:
English:	Centimeter-scale high-performance few-layer MoS2 fabricated by RF magnetron sputtering and subsequent post-deposition annealing

Author

Japanese:	S. Ishihara, Y. Hibino, N. Sawamoto, 大橋匠, 松浦賢太朗, 若林整, 小椋厚志.
English:	S. Ishihara, Y. Hibino, N. Sawamoto, T. Ohashi, K. Matsuura, H. Wakabayashi, A. Ogura.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Solid State Devices and Materials

Conference site

Japanese:
English:	Tsukuba