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Title
Japanese: 
English:Diagnostics of low-pressure discharge argon plasma by multi-optical emission line analysis based on the collisional-radiative model 
Author
Japanese: 山下雄也, 山崎文徳, 根津篤, 赤塚洋.  
English: Yuya Yamashita, Fuminori Yamazaki, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:JPN. J. APPL. PHYS. 
Volume, Number, Page Vol. 58    No. 1    016004
Published date Jan. 4, 2019 
Publisher
Japanese: 
English:IOP Science 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL http://iopscience.iop.org/article/10.7567/1347-4065/aaf0a8
 
DOI https://doi.org/10.7567/1347-4065/aaf0a8
Abstract This work is focused on diagnostics of electron temperature (1.0 eV–3.8 eV) and electron density (1.0 × 109 cm−3–5.0 × 1012 cm−3) of lowpressure (133 Pa) discharge argon plasma by optical emission spectroscopic (OES) measurement. The diagnostic method using multi-emission lines was analyzed. First, the excitation-kinetic models were obtained by extracting dominant kinetic processes based on the collisional-radiative model. Then, the diagnostic equations for wide range of electron temperature and density were proposed to describe the approximate excitation kinetic balance of several excited levels. 15 optical emission lines (wavelength range: 340.7 nm–912.3 nm) were selected for OES measurement. RMS of the theoretical relative error was found to be 5.96% for electron temperature, while 32.6% for electron density. The diagnostics of 2.45 GHz microwave plasma was demonstrated by the proposed method and by the probe method. The electron density results by the proposed method were in good agreement with the probe method.

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