Low-Temperature MoS2 Film Formation using Sputtering and H2S Annealing

Publication Information

Title

Japanese:
English:	Low-Temperature MoS2 Film Formation using Sputtering and H2S Annealing

Author

Japanese:	清水淳一, 大橋匠, 松浦賢太朗, 宗田伊理也, 角嶋邦之, 筒井一生, 五十嵐信行, 若林整, N. Ikarashi.
English:	J. Shimizu, T. Ohashi, K. Matsuura, I. Muneta, K. Kakushima, K. Tsutsui, N. Ikarashi, H. Wakabayashi, N. Ikarashi.

Language

English

Journal/Book name

Japanese:
English:	Journal of the Electron Devices Society

Volume, Number, Page

Vol. 7 No. 1 p. 2

Published date

Oct. 31, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI