Mechanism for High Hall-Effect Mobility in Sputtered-MoS2 Film Controlling Particle Energy

Publication Information

Title

Japanese:
English:	Mechanism for High Hall-Effect Mobility in Sputtered-MoS2 Film Controlling Particle Energy

Author

Japanese:	T. Sakamoto, 大橋匠, 松浦賢太朗, 宗田伊理也, 角嶋邦之, 筒井一生, Y. Suzuki, 五十嵐信行, 若林整.
English:	T. Sakamoto, T. Ohashi, K. Matsuura, I. Muneta, K. Kakushima, K. Tsutsui, Y. Suzuki, N. Ikarashi, H. Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

Conference site

Japanese:
English:	Burlingame, CA

DOI