Hall-Effect Mobility Enhancement of Sputtered MoS2 Film by Vapor Phase Sulfurization through Al2O3 Passivation Film

Publication Information

Title

Japanese:
English:	Hall-Effect Mobility Enhancement of Sputtered MoS2 Film by Vapor Phase Sulfurization through Al2O3 Passivation Film

Author

Japanese:	M. Hamada, 松浦賢太朗, T. Sakamoto, H. Tanigawa, 大橋匠, 宗田伊理也, 星井拓也, 角嶋邦之, 筒井一生, 若林整.
English:	M. Hamada, K. Matsuura, T. Sakamoto, H. Tanigawa, T. Ohashi, I. Muneta, T. Hoshii, K. Kakushima, K. Tsutsui, H. Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2018 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

Conference site

Japanese:
English:	Burlingame, CA

DOI